设备技术参数 Equipment technical parameters |
真空室材质 Vacuum chamber material | 不锈钢、碳钢 Stainless steel, carbon steel |
蒸镀方式 Metalizing mode | 单面镀膜、双面镀膜 Single side coating, double side coating |
蒸镀模式 Metalizing model | 磁控溅射 Magnetron sputtering |
有效镀宽 Effective width of coating | 400mm-1700mm |
最大卷径 Max.rolling diameter | 500mm-1300mm |
卷绕速度 Wind speed | 1m/min ~15m/min(2m/min ~30m/min) |
可镀材料 Can be plated material | 铜、铬、钛、银等 Cu, Cr, Ti, Ag, etc |
镀膜基材 Coating substrate | PET(3.8U-300U)PI(15U-150U)铜、铝箔、无纺布、纸等各种卷材 PET (3.8 u-300u) PI (15u-150u) copper, aluminum foil, non-woven fabric, paper and other coils |
常用真空抽气时间 Commonly used vacuum extraction time | 清洁容器抽至8.5×10-3Pa≤30min Clean the container until 8.5×10-3pa ≤30min |
极限真空抽气时间 Limit vacuum time | 清洁空容器抽至5×10-4Pa≤24h Clean empty containers and pump until 5×10-4pa ≤24h |
极限压力(清洁、空载) Extreme pressure (clean, no load) | 7×10-4Pa |
水冷辊直径 Diameter of water-cooled roll | φ500mm-φ1200mm |
水冷辊冷冻工作温度 Water cooling roller freezing working temperature | -25℃~80℃ |
离子源 Ion source | 线性离子源 Linear ion source |
靶体形式 The target body form | 平面靶、圆柱靶 Plane target、 cylindrical target |
磁控靶电源 Magnetic target power supply | 直流、中频 Dc,if |
磁控靶工作压力 Magnetic target operating pressure | 2×10-1Pa |
磁控靶工作气体 Magnetically controlled target working gas | 氩气、氧气,纯度99.99% Ar, O2, 99.99% purity |
磁控靶工作气体控制方式 Magnetic target working gas control mode | 质量流量控制器控制 Mass flow controller control |
卷绕系统 The winding system | 采用西门子变频恒张力全自动收放卷系统 Siemens variable frequency constant tension automatic winding and unwinding system is adopted |
舒展系统 Stretch system | 收卷放卷端各有一条360度可调舒展辊 There is a 360-degree adjustable stretch roll at each end of winding and unwinding |
驱动电机 Drive motor | 西门子电机 Siemens motor |
气胀轴 Inflatable shaft | 胀块式、键条式等 Bulk-type, key-bar type, etc |
气胀轴直径 Inflation axis diameter | 3″、 6″气胀轴 3 ", 6 "gas expansion axis |
真空系统 Vacuum system | φ400分子泵,速度3600升/秒 Phi 400 molecular pump, speed 3600 L/S |
ZJ2500罗茨泵,速度2500升/秒 ZJ2500 roots pump, speed 2500 L/S |
2H160滑阀泵,速度160升/秒 2H160 slide valve pump, speed 160 L/S |
冷暖交换机组 Heating and cooling exchange unit |
深冷捕集器 Cryogenic trap |
功率 power | 90KW-200KW |
电源 The power supply | 380V 三相五线 380V Three phase five wire |